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Laser parameter settings and procedure of laser scanning.
| Structure | Laser Parameters | |||
|---|---|---|---|---|
| Pulse Energy (µJ) | Fluence in Focus (J/cm²) | Line Overlap (%) | Procedure of Laser Passages | |
| Micro1 | 50 | 9.82 | 60 | Grid |
| Micro2 | 50 | 9.82 | 30 | Grid |
| FLIPSS1 | 15 | 2.95 | 90 | Line |
| FLIPSS2 | 5 | 0.98 | 80 | Grid |
