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. 2019 Jul 8;19(13):3004. doi: 10.3390/s19133004

Table 1.

Sputtering parameters for the different sensing matrices.

Material TiO2 NiO
Power (W) 100 50
Depostion Time (min) 60 50
Pressure (mTorr) 30 3
Gas flow (Ar:O2, sccm) 20:1 10:0
Ref. [25]
2019		 [26]
2019