. 2019 Jul 3;116(30):14829–14834. doi: 10.1073/pnas.1904926116

Table 1.

Target and measured compositions of Mg-TM-N thin films on glass substrates

Cation stoichiometric		Mg-rich
Target	Measured	Target	Measured
MgTiN₂	Mg_0.97TiN_2.03	Mg_1.5Ti_0.5N₂	Mg_1.54Ti_0.46N_1.82
MgZrN₂	Mg_0.96ZrN_1.87	Mg_1.5Zr_0.5N₂	Mg_1.54Zr_0.46N_1.81
MgHfN₂	Mg_1.03HfN_2.21	Mg_1.5Hf_0.5N₂	Mg_1.52Hf_0.48N_1.88
Mg₂NbN₃	Mg_2.04NbN_2.78	Mg_2.5Nb_0.5N₃	Mg_2.46Nb_0.54N_2.47

Substoichiometric nitrogen measured from Mg-rich compositions is likely partially substituted by oxygen. Oxygen content measured from similar films deposited on C ranged from ∼3 at % (stoichiometric) to ∼7 at % (Mg-rich).