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(a) Number of active sites per geometric area (cm2) determined from Cu-UPD measurements for WS2 films with various thicknesses (tApp) grown using the H2S and H2 + H2S PEALD processes. (b) IR-corrected cathodic polarization curves (LSV) and (c) corresponding Tafel plots. (d) Stability of the overpotential required to reach a current density of 5 mA/cm2 (η5) for over 25 h of the WS2 electrocatalyst (∼8 nm) synthesized using the H2S process.
