. 2019 Jun 25;31(14):5104–5115. doi: 10.1021/acs.chemmater.9b01008

Table 3. Figures of Merit for the HER Performance of WS₂ Films with Varying Thicknesses Grown Using the H₂S and H₂ + H₂S Processes.

PEALD process	apparent film thickness (nm)	η₁₀ (mV)	Tafel slope (mV/decade)
H₂S	∼8	–394	122
	∼32	–432	111
H₂ + H₂S	∼8	–461	129
	∼32	–506	177

Table 3. Figures of Merit for the HER Performance of WS2 Films with Varying Thicknesses Grown Using the H2S and H2 + H2S Processes.