Skip to main content
. Author manuscript; available in PMC: 2020 May 20.
Published before final editing as: IEEE Trans Biomed Eng. 2018 Nov 20:10.1109/TBME.2018.2882415. doi: 10.1109/TBME.2018.2882415

Fig. 7.

Fig. 7.

FEA simulation result of the winged sensor – used with the Type F packages – with the wings anchored. The sensor resonates at 169 kHz in a longitudinal mode shape with a maximum displacement of 30 nm.