ITO	Sn-doped In${}_2$O${}_3$
FTO	Fluorine-doped SnO${}_2$
AZO	Al-doped ZnO
ALD	atomic-layer-deposition
TMA	trimethylaluminium
XPS	X-ray photoelectron spectroscopy
XRD	X-ray diffraction
GIXRD	grazing incidence X-ray diffraction
RF	radio frequency