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Summary of statistical parameters needed to assess the trueness of the approach, based on measurement of the modal equivalent circular diameter (ECD) of ERM-FD100 and ERM-FD304 at magnifications of 18,500× and 68,000×.
| Material | Magnification | Cm (nm) | uc(x) (nm) | CCRM (nm) | uCRM (nm) | Δm (nm) | uΔ (nm) | UΔ (nm) |
|---|---|---|---|---|---|---|---|---|
| ERM-FD100 | 18,500× | 19.2 | 0.9 | 19.4 | 0.7 | 0.2 | 1.1 | 2.3 |
| 68,000× | 19.4 | 0.8 | 19.4 | 0.7 | 0.0 | 1.1 | 2.1 | |
| ERM-FD304 | 18,500× | 25.5 | 1.3 | 27.8 | 0.8 | 2.3 | 1.5 | 3.1 |
| 68,000× | 24.9 | 1.0 | 27.8 | 0.8 | 2.9 | 1.3 | 2.6 |
