Figure 26.
Arrows in the microscopic picture show the residual silicon around corners of the actuators after DRIE. Picture taken from the backside of the actuators.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.