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. 2019 Aug 7;10:3547. doi: 10.1038/s41467-019-11578-y

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 2 — HCTA based on-chip metalens. a In-plane light distribution of |E_y|² in the middle of the silicon slab with incident light parallel to its optical axis. Inset: cross-sectional view of the light distribution on the focal plane, with the minimal spot size marked as FWHM. b Simulated electric field distribution, E_y, in the region highlighted by a dashed box in a. c Simulated focusing efficiency (solid dots), transmission (empty circles) and FWHM versus focal length as marked in a. The curves are eye guides. The lens dimension is fixed at 10 µm with varying lens design. d Focusing efficiency, transmission and the FWHM of the metalens with a focal length of 25 μm. e Focusing efficiency, transmission and the FWHM of the metalens with a focal length of 25 μm at oblique incidence angle from 0^o to 20^o. Inset: In-plane light distribution of |E_y|² at an oblique incident angle of 7.5°