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. 2019 Aug 7;10:3547. doi: 10.1038/s41467-019-11578-y

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 3 — Demonstration of on-chip low loss metalens for ultracompact taper. a Scanning electron microscope (SEM) image of an on-chip metalens with a focusing length of 8 μm, object distance of 44 µm, and image distance of 10.1 μm. Eleven single mode waveguides are placed on the output plane for mapping the spatial distribution of light. b Comparison of the simulated (solid lines) and measured intensity profile (filled and empty circles stand for the positive and negative coordinates respectively) along the optical axis. c The mode profile evolvement with Δx, and the black line is the profile at the focusing plane. The error bars represent the standard deviation (s.d.) for three measurements. d Transmission spectra of a 13.7-μm-long taper with and without metalens, after normalization to a grating coupler with a 250-μm long taper. Inset: SEM image of the ultracompact metalens taper connecting a grating coupler (width of 11 μm) and single mode waveguide (width of 0.5 μm) superimposed with the simulated intensity distribution