Fig. 3.

Correction for mis-identified spots and calculation of substrate strain. A) A Voronoi diagram is generated for hexagonal patterns (green); mis-identified spots are determined by examining degenerate geometries in the pattern, and replacement spots are added (blue). B) Principal strains for each Delaunay triangle are calculated using the deflection map and linear plane strain equations. Cell outlines are indicated in black, while the region of influence surrounding each cell is colored per cell. Triangles are colored with principal strain magnitude. C) Principal strain vectors for Delaunay triangles. Strains are shown as vectors whose length corresponds to the magnitude of strain and whose direction corresponds with the direction of principal strain.