Table 4.

Specifications of the microswitch (a) material properties⁴⁷ (b) dimensions.

	Parameter	Young’s modulus	Poisson’s ratio	Size parameter	Surface stress	Surface elasticity	Coefficient of thermal exp.
	Symbol	E	v	ℓ	τ 0	E S	α t
(a)	Value	68.5 MPa	0.3	30 nm	0.90 N/m	6.09 N/m	−7.4 × 10−6 K−1
	Parameter	Electrode width	Electrode thickness	Electrode length	Initial gap	Spring stiffness
	Symbol	b	h	L	G	K S
(b)	Value	0.1 μm	0.1 μm	5 μm	0.3 μm	5 N/m