Table 1.

Geometrical parameters of the final optimized cavity.

Parameter	Description	Value (mm)
L s	Total length of substrate	45
W s	Total width of substrate	45
L f	Length of CPW feedline*	18.5
W of	Outer width of CPW feedline	2.77
W if	Inner width of CPW feedline	2
r c	Radius of cavity	25.2
r p	Radius of capacitive post	14.1
d vp	Diameter of via of capacitive post	1.6
s vp	Space between two adjacent vias of capacitive post	3.31
d ah	Diameter of air hole	0.5
s ah	Space between two adjacent air holes	1.25
g	Width of L-shaped slot	0.9
h 1	Height of substrates 1 and 4	2
h 2	Height of substrates 2 and 3	0.5
h s	Height of sensitive region	0.3

* CPW = coplanar waveguide.