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Mathematical equation for the correlation between the thermovoltage [mV] (y) and temperature [°C] (x) of the different thin film sensor designs.
| Coating | Option a | Option b | Option c |
|---|---|---|---|
| AlN-1 | y = 0.0414x − 0.0458 | y = 0.0414x − 0.0459 | y = 0.0414x − 0.0476 |
| AlN-2 | y = 0.0414x − 0.0455 | y = 0.0414x − 0.0461 | y = 0.0414x − 0.0476 |
| AlN-3 | y = 0.0414x − 0.0454 | y = 0.0414x − 0.0460 | y = 0.0414x − 0.0483 |
| BCN-1 | y = 0.0414x − 0.0464 | y = 0.0414x − 0.0468 | y = 0.0414x − 0.0484 |
