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Characteristics of positive tone photoresists based on photocleavable epoxy-based thermosets.
| Resin Formulation | D0 [J/cm2] | D100 [J/cm2] | γ | Resolution [µm] |
|---|---|---|---|---|
| epoxy-NBE/HHMPA | 16.3 | 2.27 | 1.17 | 8 |
| epoxy-NBE/HHPA | 19.5 | 0.26 | 0.53 | >10 |
| epoxy-NBE/DDSA | 19.7 | 0.25 | 0.53 | >10 |
