Table 3.
Element | 18-14 | 18-15 | 18-13-1 | |||
---|---|---|---|---|---|---|
3 nm | 100 nm | 3 nm | 100 nm | 3 nm | 100 nm | |
O | 85 | 20 | 87 | 15 | 80 | 14 |
Ti | 10 | 49 | 7 | 54 | 11 | 54 |
Zr | 2 | 17 | 5 | 17 | 2 | 17 |
Nb | 2 | 14 | 1 | 14 | 7 | 14 |
Ta | – | – | – | – | – | – |
Element | 18-14 | 18-15 | 18-13-1 | |||
---|---|---|---|---|---|---|
3 nm | 100 nm | 3 nm | 100 nm | 3 nm | 100 nm | |
O | 85 | 20 | 87 | 15 | 80 | 14 |
Ti | 10 | 49 | 7 | 54 | 11 | 54 |
Zr | 2 | 17 | 5 | 17 | 2 | 17 |
Nb | 2 | 14 | 1 | 14 | 7 | 14 |
Ta | – | – | – | – | – | – |