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. Author manuscript; available in PMC: 2019 Aug 30.
Published in final edited form as: Nat Protoc. 2019 May 17;14(6):1772–1802. doi: 10.1038/s41596-019-0161-7

Fig. 4 |. E-beam writing system.

Fig. 4 |

a, Photo of JEOL E-beam writing system. The samples are transferred into the machien from the loading chamber, b, Photo of samples in a cassette. The substrate pieces (coated by CSAR 62 and Electra 92) are fixed in a holder which is then placed in a cassette.