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. Author manuscript; available in PMC: 2019 Aug 30.
Published in final edited form as: Nat Protoc. 2019 May 17;14(6):1772–1802. doi: 10.1038/s41596-019-0161-7

Fig. 5 |. Inspections through nanofabrication process.

Fig. 5 |

a-c, Optical micrographs of quartz pieces after E-beam writing and development, including 200 nm diameter pillars with a 2.5 μm pitch (a), bars with varying widths (b), CUI patterns (c). d-f, Optical micrographs of quartz pieces after metal deposition and lift-off, including 200 nm diameter pillars with a 2.5 μm pitch (d), bars with varying widths (e), CUI patterns (f). Scale bars, 5 μm.