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. 2019 Sep 6;10:4024. doi: 10.1038/s41467-019-12030-x

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 2 — Detection of tiny differential pressures. a Pressure-response curves for PET membranes of different thicknesses. Error bars represent the s.d. of the conductance. b ΔG/G₀ versus strain ε curves for an actuation layer in the pressure sensor. c The FEA result of the strain distribution on the cross-section along the center line of the PET membrane under different pressures. d Mechanical deformation at various position on the upper surface of the PET membrane. x denotes distance between the center of PET and the point as shown in c. The inset is a partial amplification of the low pressure regime. e ΔG/G₀ response of loading and unloading cycles for different pressures. f The RMS error in ΔG/G₀ at different ΔP. The inset shows a typical ΔG/G₀ fluctuation, which was used to calculate the RMS errors. Both right axes show the pressure converted from left ΔG/G₀. g Real-time transient ΔG/G₀ by applying ΔP = 0.5 Pa. Data of e, f, and g were from measurements on a sensor with a 0.05-mm-thick PET. h A comparison of the sensitivity and resolution of the present device with other nanostructure-based pressure sensors. Source data are provided as a Source Data file