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. 2019 Aug 22;12(17):2687. doi: 10.3390/ma12172687

Table 1.

All solid-state Li microbatteries with a LiCoO2 (LCO) cathode film fabricated by the RF-sputtering technique.

Electrochemical Chain Specific Capacity (µAh cm−2 µm−1) Cyclability @ Current Density Ref.
Li/LiPON/6.2 µm LCO/Pt/Ti/glass 40 40@20 µA cm−2 [22]
Li/1.5 µm LiPON/Pt/3.7 µm LCO 67 50@200 µA cm−2 [23]
Li/LiPON/0.5 µm LCO/Pt 50 140@10 µA cm−2 [24]
Li/1.4 µm LiPON/0.45 µm LCO/Au 40 800@0.4C (10 µA cm−2) [25]
Li/LiPON/NASICON/LCO/Pt 15 50@0.01C [26]
Li/Li2.64PO2.81N0.33/LCO/Pt/mica 22 800@10C [27]
Li/Li3.09BO2.53N0.52/LCO/Pt/mica 44.3 1000@1C [28]
Li/LiPON/LCO/Au/Ti/SiO2/Si 58 30@4C [29]
Li/LiPON/LCO/Pt/Ti/TiO2/Al2O3 60 500@5C [30]