Table 2.

The ionic conductivity of LiPON films prepared by RF-sputtering.

Composition	Target	N/P Ratio	Conductivity (S cm−1)	Ref.
Li4.2PO2.8N0.46	Li3PO4	0.46	3.3 × 10−6	[33]
Li4.2PO2.8N1.2	Li3PO4 +Li3N	1.2	4.1 × 10−7	[34]
Li2.971PO1.875N1.25	Li3PO4	1.2	1.67 × 10−6	[35]
Li3.3PO2.1N1.4	Li3PO4	1.4	1.6 × 10−6	[36]
Li2.9PO2.9N0.5	Li3PO4	0.5	1.4 × 10−6	[37]
Li4.0PO3.9N0.4	Li3PO4	0.4	1.75 × 10−6	[38]
Li3.2PO3.0N1.0	Li3PO4	1.0	3.0 × 10−6	[38]