Table 1.
Comparison of Sensitivity Characteristics of Humidity Sensors.
| Materials | Measure Range | Sensitivity | Response/Recovery Time | Temperature | Mass/Thickness of Coated Film |
|---|---|---|---|---|---|
| SAW with PVA Film | 16–72.8%RH | 89.34 kHz/%RH | -/- | 20 °C | -/910 nm |
| Patterned on the Reflectors [59] | |||||
| SAW with PVA Film | 15–59.1%RH | 23.09 kHz/%RH | -/- | 20 °C | -/865 nm |
| Opened at IDT Pads [59] | |||||
| Nanoflower TiO-shaped QCM [60] | 0–97%RH | 15.3 Hz/%RH | 9 s/3 s (At 97%RH) | 20 °C | 11827 ng/1–4 μm |
| Nanosphere TiO2-shaped QCM [60] | 0–97%RH | 18.9 Hz/%RH | 6 s/3 s (At 97%RH) | 20 °C | 11801 ng/1–3 μm |
| Hollow Ball-like TiO2-coated QCM [60] | 0–97%RH | 33.8 Hz/%RH | 5 s/2 s (At 97%RH) | 20 °C | 11676 ng/300 nm |
| PDDAC /GO, Film-based QCM [61] | 0–97%RH | 25.4 Hz/%RH | 7 s/3 s (At 97%RH) | 25 °C | 5518 ng/- |
| Acidized-MWCNTs -coated QCM [62] | 11–95%RH | 221.4 HZ/%RH | 49 s/6 s (At 95%RH) | 25 °C | 21114 ng/- |