Table 2.

Dimension of a sensor, composed of multilayers

Dimension [µm]	PI	Ag	Complete sensor
Thickness	2.7 ± 0.05	4.1 ± 0.4a)	12.4 ± 0.6
Width	248.3 ± 5.7	188.9 ± 20.2	305.9 ± 55.3

^a)Skin depth of silver at 6.2 MHz is 25.5 µm.