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. Author manuscript; available in PMC: 2020 Jan 1.
Published in final edited form as: J Vib Acoust. 2019;141:10.1115/1.4042929. doi: 10.1115/1.4042929

Fig. 1.

Fig. 1

Air-backed diaphragms for acoustic pressure sensors: (a) schematic of a circular clamped diaphragm backed by a cylindrical air cavity with rigid side and bottom walls and (b) natural frequencies of using different materials to achieve the same sensitivity without considering the effect of the backing cavity (L = 67 µm, R = 40 µm)