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(a) The scanning electron microscopy (SEM) image of the cross section of the SOG cap; (b) Cross section of the suspended resonator with an undercut of 16.6 μm on the anchor; (c) Image of the top view of the resonator; (d) Image of a prototype sensor with a dimension of 10 mm × 10 mm; (e) Image of packaged prototype of the resonant pressure micro sensor.
