Table 1.

Properties of materials used in finite element method.

Items		Silicon	BF33
Young’s modulus (GPa)		165	64
Density (g/cm3)		2.33	2.23
Poisson’s ratio		0.28	0.2
CTE (ppm/°C)	20 °C	2.46	3.25
	250 °C	3.61	3.25
	500 °C	4.15	3.5