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. 2019 Sep 13;19(18):3954. doi: 10.3390/s19183954

Figure 5.

Figure 5

(a) LACM sensor array; (b) zoomed-in image of a poly-Si jumper over etched trenches acting as the second level of electrical connections; (c) magnified view of a suspended central finger with asymmetrically patterned polyimide and anti-stiction micro-staple holder.