Table 2.
Minimum Feature Size | Aspect Ratio | Dimensional Accuracy | Young’s Modulus | Roughness (Ra) | Time | |
---|---|---|---|---|---|---|
Micromilling | 50 µm for sunk features | 1.5 (features in the range between 50 and 100 µm) | 20 µm | 180 GPa | 0.5–1 µm | 6 days |
LIGA and LIGA like processes | 100 nm | 2 (features in the range between 10 and 100 µm) | 5 µm | 170 GPa | <15 nm | 30 days |
Selective laser melting | 100 µm | 6–10 (features width is larger than 100 µm) | 50 µm | 180 GPa | 20~30 µm | ~20 min |