Table 2.
Deposition Duration (s) | C–C/C–H [C1] 285.0 eV |
C–NHx [C2] 285.9 eV |
C=N/C≡N/C–O [C3] 286.5 eV |
N–C=O/C=O [C4] 288.0 eV |
O–C=O [C5] 289.0 eV |
---|---|---|---|---|---|
0 | 58.9 ± 0.9 | - | 25.8 ± 1.0 | - | 15.3 ± 0.4 |
10 | 54.3 ± 1.7 | 7.3 ± 1.1 | 27.5 ± 0.9 | 6.0 ± 0.4 | 5.0 ± 0.3 |
20 | 51.2 ± 1.5 | 9.0 ± 1.1 | 29.3 ± 1.5 | 6.4 ± 0.7 | 5.2 ± 0.5 |
60 | 48.6 ± 1.6 | 6.3 ± 1.2 | 34.3 ± 0.6 | 8.2 ± 0.7 | 2.7 ± 0.2 |
90 | 47.0 ± 1.6 | 5.8 ± 1.3 | 36.8 ± 2.2 | 7.9 ± 1.2 | 2.6 ± 0.3 |
120 | 49.4 ± 1.6 | 5.2 ± 0.9 | 34.6 ± 1.8 | 7.9 ± 0.3 | 2.8 ± 0.3 |
240 | 55.7 ± 1.9 | 6.7 ± 1.7 | 31.0 ± 3.6 | 5.3 ± 0.5 | 1.4 ± 0.3 |
360 | 61.2 ± 1.8 | 6.4 ± 0.6 | 26.2 ± 2.5 | 5.1 ± 0.5 | 1.1 ± 0.6 |