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. 2019 Sep 10;10(9):593. doi: 10.3390/mi10090593

Table 1.

Main advantages, disadvantages, resolution range and aspect ratio of microfabrication techniques used to develop microfluidic devices using polymer substrates. Adapted from [14].

Fabrication Technique Advantages Disadvantages Resolution Range and Aspect Ratio
Hot embossing Precise and rapid in the replication of microstructures. Mass production. Restricted to thermoplastics. Time-consuming. Complex 3D structures are difficult to be fabricated. Resolution between sub-100 nm and millimetre. Moderate aspect ratio (5:1) [32,33]
Injection molding Mass production. Fine features. Low cycle time. Highly automated. Restricted to thermoplastics. High cost mold. Nano-size precision is limited. Resolution between sub-100 nm and millimetre. High aspect ratio (20:1) [34]
Laser photoablation Rapid. Large format production. Limited materials. Multiple treatment session. Difficulties for mass production. Micro-size precision is limited. Resolution between micrometre and millimetre. High aspect ratio (30:1) [35,36]
X-ray lithography High-resolution. Straight and smooth walls. Complex and difficult master fabrication. Time consuming and high cost process. Resolution between few nanometres and micrometres. Ultra-high aspect ratio (350:1) [37]
Soft-lithography High-resolution and 3D geometries. Cost-effective. Excellent micro-size precision. Pattern deformation and vulnerability to defects. Difficult to fabricate circular 3D geometries. Resolution between 30 nm and 500 m. High aspect ratio (20:1) [18]
Xurography Low-cost and rapid technique. Complex 3D structures are difficult to be fabricated. Micro-size precision is limited. Resolution between 150 m and millimetre. Moderate aspect ratio (8:1) [21,23,38,39]
Direct laser plotting Low-cost and rapid technique. Free-mask technique. Good micro-size precision. Complex 3D structures are difficult to be fabricated. Micro-size precision is limited. Reproducibility of the microdevices. Resolution between 10–500 m. Moderate aspect ratio (7:1) [40,41]
Micromilling Low-cost and rapid technique. Free-mask technique. Complex 3D structures are difficult to be fabricated. Micro-size precision is limited. Reproducibility of the microdevices. Roughness. Resolution between 30 m and millimetre. Moderate aspect ratio (8:1) [26,42]
Desktop fused deposition modeling (FDM), 3D-printing Low-cost and rapid technique to fabricate prototypes. Micro-size precision is limited. High roughness and complex to perform flow visualizations. Not suitable for mass production. Resolution between 100 m and millimetre. Moderate aspect ratio (10:1) [43,44,45]
Nanofabrication High-resolution of 2D and 3D geometries. Excellent nano-size precision. Highly repeatable, periodical structures. High cost. Multiple process steps. Limited for microfluidic applications. Resolution between 1–800 nm. Ultra-high aspect ratio (100:1) [17,46]