Hot embossing |
Precise and rapid in the replication of microstructures. Mass production. |
Restricted to thermoplastics. Time-consuming. Complex 3D structures are difficult to be fabricated. |
Resolution between sub-100 nm and millimetre. Moderate aspect ratio (5:1) [32,33] |
Injection molding |
Mass production. Fine features. Low cycle time. Highly automated. |
Restricted to thermoplastics. High cost mold. Nano-size precision is limited. |
Resolution between sub-100 nm and millimetre. High aspect ratio (20:1) [34] |
Laser photoablation |
Rapid. Large format production. |
Limited materials. Multiple treatment session. Difficulties for mass production. Micro-size precision is limited. |
Resolution between micrometre and millimetre. High aspect ratio (30:1) [35,36] |
X-ray lithography |
High-resolution. Straight and smooth walls. |
Complex and difficult master fabrication. Time consuming and high cost process. |
Resolution between few nanometres and micrometres. Ultra-high aspect ratio (350:1) [37] |
Soft-lithography |
High-resolution and 3D geometries. Cost-effective. Excellent micro-size precision. |
Pattern deformation and vulnerability to defects. Difficult to fabricate circular 3D geometries. |
Resolution between 30 nm and 500 m. High aspect ratio (20:1) [18] |
Xurography |
Low-cost and rapid technique. |
Complex 3D structures are difficult to be fabricated. Micro-size precision is limited. |
Resolution between 150 m and millimetre. Moderate aspect ratio (8:1) [21,23,38,39] |
Direct laser plotting |
Low-cost and rapid technique. Free-mask technique. Good micro-size precision. |
Complex 3D structures are difficult to be fabricated. Micro-size precision is limited. Reproducibility of the microdevices. |
Resolution between 10–500 m. Moderate aspect ratio (7:1) [40,41] |
Micromilling |
Low-cost and rapid technique. Free-mask technique. |
Complex 3D structures are difficult to be fabricated. Micro-size precision is limited. Reproducibility of the microdevices. Roughness. |
Resolution between 30 m and millimetre. Moderate aspect ratio (8:1) [26,42] |
Desktop fused deposition modeling (FDM), 3D-printing |
Low-cost and rapid technique to fabricate prototypes. |
Micro-size precision is limited. High roughness and complex to perform flow visualizations. Not suitable for mass production. |
Resolution between 100 m and millimetre. Moderate aspect ratio (10:1) [43,44,45] |
Nanofabrication |
High-resolution of 2D and 3D geometries. Excellent nano-size precision. Highly repeatable, periodical structures. |
High cost. Multiple process steps. Limited for microfluidic applications. |
Resolution between 1–800 nm. Ultra-high aspect ratio (100:1) [17,46] |