Table 3.

Summary of comparison with previous works.

Reference	[19]	[20]	[21]	[22]	[23]	This Work
Material	Silicon	Silicon	Silicon	Silicon	Silicon	Silicon
Frequency (Hz)	27934	3625	803950	25600	31462	93228
SF (Hz/g)	82	5.09	427	10	66.2	223.7
Freq. TCF (ppm/°C)	—	−28.9	−23	−29	58	−28.8
Bias TCF (mg/°C)	3.1	2.64	0.14	0.11	1.1	0.7
Temp. range (°C)	3–30	−40–40	−20–80	5–95	−40–60	−40–60