Table 1. Parameters of Plasma Treatment.
| power (W) | frequency (kHz) | gap (mm) | carrier gas flow rates (slpm) | main gas flow rates (slpm) | temperature (°C) | scan speed (mm/s) | |
|---|---|---|---|---|---|---|---|
| CDA | 400 | 35 | 15 | 40 | 125 | ||
| HMDSO | 400 | 35 | 15 | 0.125 | 40 | 36 | 25 |
| AAC | 350 | 35 | 15 | 0.300 | 40 | 60 | 125 |
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