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| precursor | Si 2p (atom %) | C 1s (atom %) | O 1s (atom %) |
|---|---|---|---|
| glass (CDA) | 26.19 | 3.01 | 70.8 |
| HMDSO/glass (CDA) | 28.72 | 10.4 | 60.87 |
| CDA/HMDSO/glass (CDA) | 28.04 | 3.15 | 68.81 |
| AAC/CDA/HMDSO/glass (CDA) | 31.01 | 2.71 | 66.28 |
