Table 1.
Aperture Dimension (mm2) | 7.73 × 7.73 |
Number of microlenses (µm) | 14 × 14 |
Microlens step (µm) | 0.552 |
Focus dynamic range (mm) | 24.1 |
Wavefront dynamic on | 5.4 λ |
Photon number for optimal accuracy | 200,000 |
Wavefront measurement accuracy | λ/70 |
Working wavelength range (nm) | 400–800 |
Readout speed (MHz) | 5 |
Electron-Multiplying gain | 1–300 |