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. 2019 Oct 7;5:45. doi: 10.1038/s41378-019-0089-7

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a The MEMS mechanism is a spring-mass system with a proof mass suspended by a curved beam and two folded beams. A slit is located in the centre of the proof mass. b The force-displacement curves of different springs are plotted. c The resonant frequency decreasing behaviour with tilt is plotted. The resonant frequency will significantly decrease from 95 Hz to 2.6 Hz (85°) when the curved beam exhibits a negative stiffness. The resonant frequency will remain at ~3.1 Hz when the mechanism is vertical. d The experimental force-displacement result is plotted along with the FEA result and the theoretical result for comparison (according to ref. ³⁵, the gravitational acceleration of our laboratory is 979 Gal)