Fig. 4. Calibration and noise performance.
a The setup of the MEMS device in the cave laboratory. b The tele-seismic signal caused by the earthquake that occurred in Hokkaido, Japan. The data were sampled at 1 Hz. c The acceleration power spectral density of the MEMS device and the seismometer (both sampled at 10 Hz) are plotted to present the noise performance. The red line represents the MEMS device, the blue line represents the seismometer, and the yellow line represents the self-noise floor of the MEMS device with the seismic noise eliminated. The minimum noise floor is ~8 μGal/√Hz at 1 Hz, while the resonant frequency is 3.1 Hz