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. 2019 Jul 15;5:28. doi: 10.1038/s41378-019-0070-5

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 3 — a SEM image of the bottom view of the fabricated pMUT array showing section line (A–A’) of Fig. 2; b SEM image of the top view of the fabricated pMUT array; c optical image of the fabricated pMUT array; d optical image of the packaged device with the pMUT array, showing the DIP switches soldered on the PCB to control individual transducers and spacers to maintain a constant distance between the cell culture plate and the transducers; voltage was applied to the pMUT array through an SMA connector