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. 2019 Jul 29;5:36. doi: 10.1038/s41378-019-0075-0

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 8 — a Humidity hysteresis characteristic of sensor D1. b Fluctuation in the resonant frequency of sensor D1 at fixed humidity levels. c Continuous response of the resonant frequency of sensor D1 to different humidity range changes. d Short-term repeatability of sensor D1 when the relative humidity is repeatedly changed between 15%RH and 80%RH. Detailed response (e) and recovery (f) processes of the sensors