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Summary of the characteristics of the SAW humidity sensors
| Sample | Surface configurations | Resonant frequency (MHz) | GO thickness (nm) |
|---|---|---|---|
| D1 | Bare path | 226.3 | 210 |
| D2 | Bare path | 226.3 | 210 |
| D3 | Bare path | 226.3 | 210 |
| D4 | Bare path | 226.3 | 130 |
| D5 | Bare path | 226.3 | 90 |
| D6 | Metallized path | 221.2 | 210 |
