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X-ray photoelectron spectroscopy (XPS) O1s spectra of InGaZnO (IGZO) films upon varying the flow rate in a mixed atmosphere of Ar and O2 (oxygen flow rate (OFR) = 35 sccm). The OFR is modulated to produce O-poor (OFR = 21 sccm), O-mid (42 sccm), and O-rich (63 sccm) IGZO thin films. The inset shows the surface morphology of IGZO thin films as a function of OFR, as observed by atomic force microscopy (AFM).
