Table 2.
Parameter | O-Content | Stress Condition |
Ndos (eV−1 cm−3) |
kTdos (eV) |
Edos (eV) |
---|---|---|---|---|---|
gTA (E) | O-poor | All conditions | 2.0 × 1019 | 0.06 | – |
O-mid | All conditions | 2.3 × 1019 | 0.065 | – | |
O-rich | All conditions | 3.0 × 1019 | 0.075 | – | |
gDA (E) | O-poor | All conditions | 1.5 × 1017 | 0.4 | – |
O-mid | All conditions | 1.6 × 1017 | 0.47 | – | |
O-rich | All conditions | 1.9 × 1017 | 0.5 | – | |
gSD (E) | O-poor | Initial | – | 0.4–0.45 | 0.3 |
After PGBS | – | ||||
After PGDBS | 5 × 1017 | ||||
After TCS | 6 × 1017 | ||||
O-mid | Initial | – | |||
After PGBS | – | ||||
After PGDBS | 3 × 1017 | ||||
After TCS | 3 × 1017 | ||||
O-rich | Initial | – | |||
After PGBS | – | ||||
After PGDBS | 2 × 1017 | ||||
After TCS | 3 × 1017 |