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. 2019 Jul 24;8:67. doi: 10.1038/s41377-019-0178-2

Fig. 3. Optical and scanning electron microscope (SEM) images of a single broadband achromatic metalens and metalens array.

Fig. 3

a Optical image of a single metalens. Scale bar: 5 μm. b Top-view SEM image of a portion of the fabricated single metalens shown in (a). Scale bar: 200 nm. c Optical image of a broadband achromatic metalens array. Scale bar: 15 μm. d Top-view SEM image of a portion of the fabricated metalens array shown in c. Scale bar: 15 μm. e Side-view SEM image of a portion of the fabricated metalens array shown in (c). Scale bar: 200 nm