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The optimized height profile of Si MDL for NA = 0.371 and focal length = 19 mm with (A) 8 levels, (B) 16 levels, (C) 32 levels, and (D) 64 levels. The corresponding simulated focusing efficiencies for the MDL with (E) 8 levels, (F) 16 levels, (G) 32 levels, and (H) 64 levels. It is observed that the focusing efficiency tends to improve only marginally beyond 16 levels in this case. All other design parameters are the same.
