Table 1.
Moduli and maximum or minimum stresses of the copper-implanted models evaluated using molecular dynamics simulations, which are shown in GPa unit. Percentages are ratios of the properties to those of amorphous silica (α-SiO2).
| Cu volume ratio [vol%] | α-SiO2 | 3 nm | 4 nm | 5 nm | 3 nm × 4 | 4 nm × 2 |
|---|---|---|---|---|---|---|
| 0 | 5 | 11 | 22 | 20 | 22 | |
| Modulus [GPa] | ||||||
| Stretch | 70.4 | 66.1 | 57.2 | 47.5 | 48.4 | 47.3 |
| 93.9% | 81.3% | 67.6% | 68.8% | 67.2% | ||
| Compress | 65.3 | 62.3 | 53.3 | 47.5 | 50.0 | 50.1 |
| 95.5% | 81.7% | 72.8% | 76.6% | 76.7% | ||
| Shear | 26.3 | 24.2 | 20.5 | 16.4 | 17.8 | 16.5 |
| 91.9% | 78.2% | 62.3% | 67.6% | 62.9% | ||
| Maximum or minimum stress [GPa] | ||||||
| Stretch | 20.7 | 17.3 | 14.6 | 10.6 | 12.4 | 10.9 |
| 83.8% | 70.5% | 51.3% | 59.9% | 52.7% | ||
| Compress | −13.4 | −13.0 | −11.7 | −10.0 | −9.5 | −9.7 |
| 97.1% | 87.2% | 74.5% | 71.4% | 72.9% | ||
| Shear | 11.2 | 9.5 | 8.1 | 5.9 | 7.1 | 6.2 |
| 84.9% | 71.9% | 52.4% | 63.3% | 55.4% | ||