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(a) The OES relative intensity of N+, H, and O species as a function of PD at PW = 1, NP = 5, and BRR = 2. (b) The relative intensity of H and O at 656.45 and 777.4 nm, respectively, with NP at different PW. The plasma generation condition was PD = 12 and BRR = 2. OES, optical emission spectroscopy; N+, nitrogen ion; H, atomic hydrogen; O, atomic oxygen; PD, pulse delay time; PW, pulse width; NP, number of pulses in a burst; BRR, burst repetition rate.
