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. 2019 May 23;27(11):16296–16307. doi: 10.1364/OE.27.016296

Fig. 6.

Fig. 6

Optical scan angle measurement. (A) Schematic of experimental set-up is shown. Photos show (B) reflector mounted on substrate along one edge, (C) vertical displacement >466 μm (chip thickness) in translation mode, (D) mechanical scan angle ~90° in torsion mode, and (E) scanner reflecting laser beam in 360° pattern.