Table 1.
SiNx coating deposition parameters of process heating, substrate temperature, deposition pressure, N2/Ar flow ratio and resulting layer thicknesses.
| Substrate | Group Name | Process Heating (kW) | Substrate Temperature (°C) | Deposition Pressure (MPa) | N2/Ar | SiNx Thickness (nm) | Interlayer Thickness (nm) |
|---|---|---|---|---|---|---|---|
| CoCrMo discs | 2D-1f-H0-P3.4 | 0 | 120 | 600 | 0.255 | 5385 | 1100 |
| 2D-1f-H3-P3.4 | 3 | 300 | 600 | 0.255 | 5240 | 1030 | |
| 2D-1f-H0-P3.4-rep | 0 | 120 | 600 | 0.26 | 6050 | 1700 | |
| 2D-3f-H0-P3.4 | 0 | 120 | 600 | 0.26 | 4399 | 1461 | |
| CoCrMo hip heads, 32 and 36 mm |
3D-3f-H0-P3.4 | 0 | 120 | 600 | 0.28 | 4399 | 1461 |
| 3D-3f-H0-P1.7 | 0 | 120 | 600 | 0.28 | 4492 | 1140 | |
| 3D-3f-H3-P3.4-C | 3 | 300 | 600 | 0.28 | 4391 | 1169 |