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. 2019 Oct 16;19(20):4487. doi: 10.3390/s19204487

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© 2019 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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(a) Simplified equivalent electrical circuit representing the lumped element model (LEM) of an MEMS microphone (MEMS MIC) sealed with one protective diaphragm (PD) and (b) with up to four PDs. Z₁ … Z₄: acoustic impedance of the PD and its interaction with the surroundings; Z₅ … Z₈: dissipation and inertia caused by the pneumatic tubing system between the PD and MEMS diaphragm; Z₉ … Z₁₂: acoustic stiffness of the pneumatic tubing system between the PD and MEMS diaphragm; Z_MEMS: acoustic impedance of the (unsealed) MEMS MIC without considering the inlet channel (pressure port).