Table A2.
Definition of matrix Z and vector p representing a system of linear equations, which describes the lumped element model (LEM) of the microphone sealed with four protective diaphragms.
| Z = | nm | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 |
| 1 | Z 1 | −Z2 | 0 | 0 | Z 5 | −Z6 | 0 | 0 | |
| 2 | Z 1 | 0 | −Z3 | 0 | Z 5 | 0 | −Z7 | 0 | |
| 3 | Z 1 | 0 | 0 | −Z4 | Z 5 | 0 | 0 | −Z8 | |
| 4 | −Z9 | 0 | 0 | 0 | (Z5 + Z9 + ZMEMS) | Z MEMS | Z MEMS | Z MEMS | |
| 5 | 0 | −Z10 | 0 | 0 | Z MEMS | (Z6 + Z10 + ZMEMS) | Z MEMS | Z MEMS | |
| 6 | 0 | 0 | −Z11 | 0 | Z MEMS | Z MEMS | (Z7 + Z11 + ZMEMS) | Z MEMS | |
| 7 | 0 | 0 | 0 | −Z12 | Z MEMS | Z MEMS | Z MEMS | (Z8 + Z12 + ZMEMS) | |
| 8 | (Z1 + Z9) | 0 | 0 | 0 | −Z9 | 0 | 0 | 0 | |
| p = | 0 | 0 | 0 | 0 | 0 | 0 | 0 | p 0 | |